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Item Id 366331
Item #: 366331
Item: SINGULUS PECVD ICP - Plasma Enhanced Chemical Vapor Deposition
Model #: Singular ICP PECVD
Serial #: N/A
Year Built: N/A
Location: California
Price: $775,000.00
Description

Singulus ICP PECVD (Plasma Enhanced Chemical Vapor Deposition) system. Excellent condition, not many wafers ran. Several STP turbo pumps. Complete with large Edwards roughing pump.

Sequence is:
-Loadlock
-PS1 = IR heating station
-PS2 = PECVD Coating, top down for intrinsic a-Si (clean chamber)
-PS3 = IR heating station
-PS4 = PECVD Coating, Top down for dopted a-Si, SiOx, SiNx (dirty chamber)
-Empty
-Loadlock

We have the full specification sheet available upon request. This system was 1,700,000.00 new.

Inquire with questions.

Additional Prep Fees May Apply
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Width: N/A
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