EPITAXIAL N2 Hydrogen Recovery Unit | 163979

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Item Details

Item Id 163979
Item #: 163979
Item: EPITAXIAL N2 Hydrogen Recovery Unit
Serial #: 80-068
Year Built: 0
Location: Kentucky
Price: $500,000.00


H2 Recovery Unit

Manufactured by CDI and installed in 1984.
This unit can process into 1000 cfm of H2 as the carrier gas. This unit was used in the semiconductor industry to recover H2 from the exhaust of EPI reactors.

On the front end of the unit was a condensers to remove TCS (triclorasilane) , the gas would proceed caustic scrubbers to remove dopant gases such as diborane phosphine, arsenic. After scrubbers the gas goes to a Nash compressor the travels through a set of dryers. The last step is the Cryo towers to remove any N2, then back to the facility to be reused as 99.1% pure H2.

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