Nordson March AP-300 Vacuum Batch Plasma Treatment System
***This instrument has been tested to specifications. Unit has slight wear from normal use. Buyer can expect a working machine and 30-day warranty. Everything pictured included. See photos for details.
(Please be advised that any warranty/guarantee/return policy provided from the seller is between the buyer and the seller only. Bid on Equipment is not and cannot be held responsible in any way. Please reference our Terms and Conditions for further information.)
includes:
AP-300 Plasma System
Edwards 28 vacuum pump
Nordson MARCH's AP series of vacuum plasma treatment systems includes batch units with small, mid-size and large vacuum chamber options that deliver process correlation, controller continuity and reliable, reproducible vacuum gas plasma treatment to customers as they expand from an R&D environment to various levels of production
The AP-300 plasma system delivers exceptionally uniform plasma cleaning and treatment for semiconductor, microelectronic packaging and assembly, and medical device manufacturing.
Plasma Treatment Equipment Features and Benefits
PLC controller with touch screen provides an intuitive graphical interface and real time process representation
Flexible shelf architecture allows processing of a wide variety of part carriers in either direct or downstream plasma mode
13.56 MHz RF generator has automatic impedance matching for unparalleled process reproducibility
Proprietary software control system generates process and production data for statistical process control
Batch style, each unit is completely self-contained, requiring minimal floor space
The pump, chamber, control electronics, and 13.56 MHz RF generator are housed in a single enclosure
The AP-300 system provides:
Durable high-quality aluminum construction and fixtures
Up to 7 removable and adjustable powered or grounded shelves for a wide range of piece-parts, components, and part carriers including magazines, trays, and boats
A compact, self-contained system chassis that houses the plasma chamber, control electronics, 13.56 MHz RF generator, and the automatic matching network (only the vacuum pump is external to the system)
An intuitive touch-screen control panel for real-time process monitoring
Convenient facility hook-ups for periodic calibration requirements used in validation processes
Support for a wide range of process gases including argon, oxygen, helium, and fluorinated gases
Maintenance access through an interlocked door or removable panels
Two standard electronic mass flow controllers for optimal gas control, with an option for two additional controllers (4 maximum)
Key Applications
Plasma cleaning
Surface activation
Adhesion improvement
Manufacturer's Specifications:
Enclosure Dimensions:
W x D x H Footprint 569W x 869D x 704H mm (22W x 34D x 28H in.)
Net Weight 221 kg (487 lbs.)
Equipment Clearance Right, Left, Front 569 mm (22 in.), Back 254 mm (10 in.)
Chamber
Maximum Volume 33.1 liters (2023 in)
Variable Electrode Configurations Power-Ground, Ground-Power, Power-Power
Number of Electrode Positions 7
Electrodes
Powered Working Area 190W x 330D mm (7.5W x 13D in.)
Ground/Perforated Working Area 229W x 330D mm (9W x 13D in.)
Floating Working Area 190W x 330D mm (7.5W x 13D in.)
RF Power
Standard Wattage 300 W
Frequency 13.56 MHz
Gas Control
Available Flow Volumes 10, 25, 50, 100, 250 or 500 sccm
Maximum Number of MFCs 4
Control & Interface
Software Control PLC Control with Touch Screen Interface
Remote Interface Plasma LINK, Process LINK
Vacuum Pump
Standard Wet Pump 19.5 cfm with Oxygen Oil Mist Eliminator
Optional Wet Pump 19.5 cfm with Corrosive Oil Mist Eliminator
Optional Purged Dry Pump 22 cfm
Power Supply 110-240 VAC, 50-60 Hz, 1-phase, 10 A
Process Gas Fitting Size & Type 6.35 mm (0.25 in.) OD Swagelok Tube
Process Gas Purity Lab or Electronic Grade
Process Gas Pressure 0.69 bar (10 psig) min. to 1.03 bar (15 psig) max., regulated
Purge Gas Fitting Size & Type 6.35 mm (0.25 in.) OD Swagelok Tube
Facilities
Purge Gas Purity Lab or Electronic Grade N2/CDA
Purge Gas Pressure 2 bar (30 psig) min. to 6.9 bar (100 psig) max., regulated
Pneumatic Valves Fitting Size &
Type 6.35 mm (0.25 in.) OD Swagelok Tube
Pneumatic Gas Purity CDA, Oil Free, Dewpoint 7C (45F),
Particulate Size <5 m
Pneumatic Gas Pressure 3.45 bar (50 psig) min. to 6.89 bar (100 psig) max, regulated
Exhaust 25.4 mm (1 in.) OD Pipe Flange
Compliance
SEMI S2/S8 (EH&S/Ergonomics)
International CE Marked
Ancillary Equipment
Gas Generators Nitrogen, Hydrogen (Requires Additional Non-Optional Hardware)
Facilities Scrubber
Additional Prep Fees May Apply
