Veeco Wyko NT 3300 Profiling System, a non-contact optical profiler, utilizes two technologies to measure a wide range of surface heights. Phase-shifting interferometry (PSI) allows measurement of smooth surfaces and small steps, while vertical scanning
interferometry (VSI) allows measurement of rough surfaces and steps up to several millimeters high.
Manufacture Specification
- Capable of handling up to 8/200mm wafers
- Non contact sub-micron Optical Profiler for 3D Surface Profilometry
- 8 Auto XY with 0.5 uM encoder / Auto TT
- Stitching Software - Vertical resolution as low as 0.1 nm or 1 Angstrom
- XY Tip/Tilt
- Motorized Z
Auto Focus
- Keyboard controller with trackball & Joystick
- 0.1um resolution 8 x 8 XY table with 63.5mm x 63.5mm bondable area
- 0.08 to 13.1 um Lateral Spatial Sampling
- 10 Micron Step Height Standard and SIC Calibration Standard
- Four Positions Motorized Turret
- 1.5IX interferometric objective, 20% RFL, 9.63mm WD
- 20IX interferometric objective, 90% RFL, 4.7mm WD - 0.5X FOV lens
- 50IX Mirau Interferometer Objective with working distance 3.4mm
- FOV : 1X, 2X, .5X or .75X with Alignment.
- System Monitor with Analog output to 9 B/W video monitor
- TMC Active Isolation Table
Additional Prep Fees May Apply.